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Proceedings of CAD'16, 2016, 306-310
Characterization and Optimization of an Electro-thermal Microactuator for Precise Track Positioning
Abstract. Micro-electro-mechanical systems (MEMS)-based mirrors are widely used in applications including optical displays, biomedical imaging, optical interconnects, optical switching, and laser beam steering. Compared to other driving mechanisms for MEMS mirrors such as electrostatic, electromagnetic and piezoelectric actuation, electro-thermal actuation has the major advantages of large displacement, large force, low actuating voltage, and low power consumption. Besides, their device fabrication process is relatively simple and fully compatible with the general integrated circuit (IC) fabrication process. In this paper, we present a MEMS mirror actuated by four suspended electro-thermal bimorphs for optical data tracking of high-density storage application. Static, transient and dynamic characteristics of the microactuator are examined using coupled electro-thermal-mechanical finite element modeling as well as schematic system behavior modeling. The microactuator design is optimized using response surface methodology to achieve large actuation displacement, small lateral shift and adequate frequency response.
Keywords. Precise Positioning, Micromirror, Electro-thermal Actuation, Coupled Finite Element Model, Schematic System Behavior Model, Response Surface Optimization